Digital BSE Imaging on SEMs
نویسندگان
چکیده
منابع مشابه
Low voltage BSE imaging using FESEM
Backscattered electron (BSE) imaging is most commonly performed by applying accelerating voltages of 10kV and above to the specimen. For imaging of surface detail, the application of a lower accelerating voltage results in less beam penetration, spread and overall specimen damage. A field emission scanning electron microscope (FESEM) operated with high emission current (50μA) was used to increa...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2011
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927611005447